| 摘要 |
<p>An optical system misalignment estimating device comprises erected/inverted posture setting means (9) for changing the set posture of an optical system to be measured, incoherent wavefront measuring means (10) for measuring the wavefront in each set posture without using the optical polynomial approximating means (15) for developing the wavefront measured value determined by the incoherent wavefront measuring means (10) into a polynomial, averaging means (11) for averaging either the value measured by the incoherent wavefront measuring means (10) or the value determined by the polynomial approximating means (15), and polynomial specific coefficient extracting means (16) for extracting a specific coefficient value of the polynomial.</p> |
