发明名称 Semiconductor device, test method for semiconductor device, and tester for semiconductor device
摘要 The present invention comprises: a plurality of output terminals through which a signal from an internal circuit is output; buffer circuits, each provided between one of the plurality of output terminals and the internal circuit; and a delay circuit connected to the specific buffer, the delay circuit delaying the signal from the internal circuit. With this arrangement, it is possible to measure a delay time from an input test signal even when a super-high-speed device is tested.
申请公布号 US2003059967(A1) 申请公布日期 2003.03.27
申请号 US20020124453 申请日期 2002.04.18
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 NISHIMURA YASUMASA
分类号 G01R31/28;G01R31/319;G01R31/3193;H01L21/66;(IPC1-7):H01L21/66 主分类号 G01R31/28
代理机构 代理人
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