发明名称 |
Semiconductor device, test method for semiconductor device, and tester for semiconductor device |
摘要 |
The present invention comprises: a plurality of output terminals through which a signal from an internal circuit is output; buffer circuits, each provided between one of the plurality of output terminals and the internal circuit; and a delay circuit connected to the specific buffer, the delay circuit delaying the signal from the internal circuit. With this arrangement, it is possible to measure a delay time from an input test signal even when a super-high-speed device is tested.
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申请公布号 |
US2003059967(A1) |
申请公布日期 |
2003.03.27 |
申请号 |
US20020124453 |
申请日期 |
2002.04.18 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
NISHIMURA YASUMASA |
分类号 |
G01R31/28;G01R31/319;G01R31/3193;H01L21/66;(IPC1-7):H01L21/66 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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