发明名称 |
Method of transferring ultra-thin substrates and application of the method to the manufacture of a multi-layer thin film device |
摘要 |
The present invention provides a method of transfer of a first planar substrate with two major surfaces to a second substrate, comprising the steps of forming the first planar substrate, attaching one of the major surfaces of the first planar substrate to a carrier by means of a release layer attaching the other major surface of the first substrate to the second substrate with a curable polymer adhesive layer partly curing the polymer adhesive layer, disconnecting the release layer from the first substrate to separate the first substrate from the carrier, followed by curing the polymer adhesive layer. The method may be used to form a stack of dies (4, 14 . . . ) which are adhered together by cured polymeric layers (7, 17). Each die (4, 14 . . . ) may include a device layer and an ultra-thin substrate manufactured and assembled by the method described above. |
申请公布号 |
US2003060034(A1) |
申请公布日期 |
2003.03.27 |
申请号 |
US20020207624 |
申请日期 |
2002.07.25 |
申请人 |
IMEC VZW, A RESEARCH CENTER IN THE COUNTRY OF BELGIUM |
发明人 |
BEYNE ERIC;COELLO-VERA AUGUSTIN;VENDIER OLIVIER |
分类号 |
H01L25/18;H01L21/68;H01L21/98;H01L23/538;H01L25/065;H01L25/07;H01L27/00;(IPC1-7):G06F17/50;H01L21/476 |
主分类号 |
H01L25/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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