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发明名称
REFURBISHING SPENT SPUTTERING TARGETS
摘要
<p>Spent sputtering targets are refurbished by filling the depleted (2) region of the target (1) with new sputter material using a hot isostatic pressing or HIP'ing technique.</p>
申请公布号
WO2003025244(A2)
申请公布日期
2003.03.27
申请号
US2002029246
申请日期
2002.09.16
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
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