Optical component used as a coupling window, rear window, coupling mirror or beam divider in a gas discharge laser, especially an excimer laser comprises a quartz-calcium fluoride combination or a quartz-magnesium fluoride combination

摘要

Optical component comprises a quartz-calcium fluoride combination or a quartz-magnesium fluoride combination. Preferred Features: The quartz material is coated on the surface which is not in contact with the laser gas. The surfaces of the calcium fluoride or magnesium fluoride material are coated.