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发明名称
Verfahren zur Herstellung von Metallisierungen auf Halbleiterkörpern unter Verwendung eines gepulsten Vakuumbogenverdampfers
摘要
申请公布号
DE19621855(C2)
申请公布日期
2003.03.27
申请号
DE19961021855
申请日期
1996.05.31
申请人
TECHNISCHE UNIVERSITAET DRESDEN;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
KLIMES, WOLFGANG;WENZEL, CHRISTIAN;URBANSKY, NORBERT;SIEMROTH, PETER;SCHUELKE, THOMAS;SCHULTRICH, BERND
分类号
C23C14/04;C23C14/32;H01L21/768;(IPC1-7):H01L21/768;H01L21/285;H01L21/320
主分类号
C23C14/04
代理机构
代理人
主权项
地址
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COMPOSITIONS
LIQUID LEVEL ADJUSTER
SPRING-ACTION SUSPENSION
TOY
OPTICAL FIBRE TERMINATION
LINEAR THRUST MECHANISM
MINING MACHINE
PLASMA REACTOR VESSEL
ION EXCHANGE RESIN
5-CHLORO-3-ISOTHIAZOLONES
EXTRUDING, THERMOFORMING AND INJECTION MOULDING OLEFIN/ STYRENE/BUTADIENE POLYMER ALLOY
RE-USING HEAT SENSITIVE TRANSFER RECORDING MEDIA
FUEL PRESSURE REGULATOR
HINGED CLOSURE ARRANGEMENT
