发明名称 |
Gas removal method and gas removal filter |
摘要 |
A gas removal filter has an ion exchanger for adsorbing a gas and at least a pair of electric resistance measuring electrodes disposed on the ion exchanger. By measuring a change in the electric resistance between at least the pair of electric resistance measuring electrodes disposed on the ion exchanger, it is possible to estimate an ion exchange group consumption ratio of the ion exchanger. The ion exchange group consumption ratio of the ion exchanger can be detected in a short period of time, and a remaining adsorption capability of the ion exchanger can be known with ease.
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申请公布号 |
US2003056646(A1) |
申请公布日期 |
2003.03.27 |
申请号 |
US20020254537 |
申请日期 |
2002.09.26 |
申请人 |
EBARA CORPORATION |
发明人 |
TANAKA AKIRA;SUZUKI YOKO;KISHI TAKASHI |
分类号 |
B01D53/04;G01N27/04;G01N30/00;(IPC1-7):B01D53/02 |
主分类号 |
B01D53/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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