发明名称 METHOD FOR CUTTING SAPPHIRE SUBSTRATE FOR SEMICONDUCTOR DEVICE
摘要 <p>A method for cutting a sapphire substrate having face A as the major face after forming a semiconductor device or in order to form a semiconductor device, characterized in that assuming the accurate face A is (11-20) and the direction of decreasing the angle being made with the c-axis is positive with reference to the line of intersection r13 between the (10-12) face or the (01-12) face and the major face, cutting lines are set in the first direction P making an angle of 0-4˚ with the intersection and the second direction Q orthogonal to the first direction.</p>
申请公布号 WO2003025990(P1) 申请公布日期 2003.03.27
申请号 JP2002007139 申请日期 2002.07.12
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