发明名称 MASK PLATE DESIGN
摘要 The present invention includes a mask plate design that includes at least one or a plurality of channels portions on a surface of the mask plate, into which electrolyte solution will accumulate when the mask plate surface is disposed on a surface of wafer, and out of which the electrolyte solution will freely flow. There are also at least one or a plurality of polish portions on the mask plate surface that allow for polishing of the wafer when the mask plate surface is disposed on a surface of wafer.
申请公布号 WO02077327(B1) 申请公布日期 2003.03.27
申请号 WO2002US06231 申请日期 2002.02.27
申请人 NUTOOL, INC. 发明人 BASOL, BULENT, M.;UZOH, CYPRIAN;BOGART, JEFF, A.
分类号 B24B37/04;C25D5/02;C25D5/08;C25D5/22;C25D7/12;C25F7/00;H01L21/288;H01L21/768;(IPC1-7):C25D5/02;B24D7/10 主分类号 B24B37/04
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