| 摘要 |
The present invention refers to a molecular drag pump, which comprises a rotator, an axle, a separating ring and a casing. On the side surface or end surface of the cylinder of the rotator are formed several gas-absorbing channels, in each of which a block for moving sealing is equipped, one side of which is a gas inlet, the other side is a gas outlet. Both sides of the moving sealing block are provided with at least one spiral sealing. Into every gas-absorbing channel is inserted a part of the separating ring. On one side of the inserted part of the separating ring there are several additional spiral separating channel. The molecular drag pump of the present invention has the advantage of less leakage, high compressing ratio and pressure, which can be combined with other molecular pumps or rotating machinery vacuum pumps by mounting on a common axe to form a group of combined vacuum pumps with good performance.
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