发明名称 |
OPTICAL INSPECTION METHOD AND APPARATUS WITH ADAPTIVE SPATIAL FILTER |
摘要 |
Method and apparatus for optical inspection of a patterned article are presented. A region on the article is illuminated with incident light to produce light returned from the illuminated region. An image of the illuminated region is acquired and analyzed for determining the intensity distribution of light components scattered from the pattern of the illuminated region within a certain collection angular field located outside a solid angle of propagation of specularly reflected light. Based on the determined distribution, light components scattered from the illuminated region and propagating with at least one predetermined solid angle segment of the certain collection angle are collected and directed to a dark-field detection unit. |
申请公布号 |
EP1295109(A2) |
申请公布日期 |
2003.03.26 |
申请号 |
EP20010946549 |
申请日期 |
2001.06.19 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
KOMEM, AMIR;MILSHTEIN, EREL |
分类号 |
G01N21/94;G01N21/95;G01N21/956;H01L21/66;(IPC1-7):G01N21/956 |
主分类号 |
G01N21/94 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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