| 发明名称 |
SPUTTERING TARGET PRODUCING FEW PARTICLES |
| 摘要 |
A sputtering target having a sprayed coating at least on the side face thereof and producing few particles. The deposit produced on the side face of the sputtering target is prevented from separating and flying. <IMAGE>
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| 申请公布号 |
KR20030024899(A) |
申请公布日期 |
2003.03.26 |
| 申请号 |
KR20037002530 |
申请日期 |
2003.02.21 |
| 申请人 |
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发明人 |
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| 分类号 |
C23C14/34;C23C4/00;C23C4/08;C23C14/00;C23C14/56 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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