FLUID TRANSFERRING SYSTEM FOR SEMICONDUCTOR FABRICATION

摘要

PURPOSE: A fluid transferring system for semiconductor fabrication is provided to minimize the remaining amount of fluid within a receptacle and maximize the quantity of the fluid consumed within the receptacle by installing an incline member having an incline plane on a bottom of the receptacle. CONSTITUTION: A receptacle(10) provides an inner space(12) to store fluid. A gas inflow line(22) is used for supplying gases to the inner space(12). A fluid supply line(32) is used for supplying the fluid stored in the inner space(12) to the outside of the receptacle(10). An incline member(50) is formed on a bottom face of the receptacle(10). The incline member(50) has an incline plane(52). The incline plane(52) has a predetermined tilt angle to a horizontal plane of the receptacle(10). The predetermined tilt angle corresponds to 20 to 50 degrees. The incline member(50) and the receptacle(10) are formed with one body.