| 发明名称 |
ANGULAR VELOCITY SENSOR AND METHOD OF ADJUSTING CHARACTERISTICS OF THE SENSOR |
| 摘要 |
<p>In an angular velocity sensor including two oscillators, the oscillators are balanced in weight precisely, thus providing improved output characteristics. In the sensor, at least one of the two oscillators has a notch having a surface roughness of not higher than 2 mu m on an edge thereof. <IMAGE></p> |
| 申请公布号 |
EP1296114(A1) |
申请公布日期 |
2003.03.26 |
| 申请号 |
EP20020712427 |
申请日期 |
2002.02.18 |
| 申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
OMAWARI, TOMOMASA;TSUBONOUCHI, HIROYUKI |
| 分类号 |
G01C19/56;G01P9/04;G01P21/02;H01L41/08;(IPC1-7):G01C19/56;H01L29/84 |
主分类号 |
G01C19/56 |
| 代理机构 |
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| 主权项 |
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