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发明名称
Ion beam machining method and device
摘要
申请公布号
EP0814494(B1)
申请公布日期
2003.03.26
申请号
EP19970304345
申请日期
1997.06.20
申请人
SEIKO INSTRUMENTS INC.
发明人
AITA, KAZUO
分类号
G01Q30/14;G01Q30/16;H01J37/305;H01J37/317;H01L21/205;H01L21/302;(IPC1-7):H01J37/305
主分类号
G01Q30/14
代理机构
代理人
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