发明名称 A method for fabricating a small area of contact between electrodes
摘要 <p>An electrode structure for use in a chalcogenide memory is disclosed. The electrode has a substantially frusto-conical shape, and is preferably formed by undercut etching a polysilicon layer beneath an oxide pattern. With this structure, improved current densities through the chaicogenide material can be achieved.</p>
申请公布号 EP1296377(A2) 申请公布日期 2003.03.26
申请号 EP20020079437 申请日期 1997.10.02
申请人 MICRON TECHNOLOGY, INC. 发明人 GILGEN, BRENT
分类号 H01L27/10;H01L27/24;H01L21/768;H01L27/105;H01L45/00;(IPC1-7):H01L27/24 主分类号 H01L27/10
代理机构 代理人
主权项
地址