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发明名称
Radiation-sensitive composition
摘要
申请公布号
EP0756203(B1)
申请公布日期
2003.03.26
申请号
EP19960110854
申请日期
1996.07.04
申请人
CLARIANT FINANCE (BVI) LIMITED
发明人
PADMANABAN, MUNIRATHNA;KINOSHITA, YOSHIAKI;FUNATO, SATORU;SUEHIRO, NATSUMI;OKAZAKI, HIROSHI;PAWLOWSKI, GEORG
分类号
G03F7/00;G03F7/004;G03F7/029;G03F7/038;G03F7/039;H01L21/027;(IPC1-7):G03F7/004
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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