| 摘要 |
PURPOSE: An operating apparatus for semiconductor fabrication equipment is provided to reduce processing errors and improve productivity by preventing an error of an indicative pen due to an influence of external electromagnetic noise. CONSTITUTION: A screen portion is used for displaying a plurality of control keys. An indicative pen(30) generates a predetermined electrical signal when the indicative pen(30) approaches any one of the control keys. A plurality of noise interception portions(32,34) are installed at a predetermined part of the indicative pen(30) in order to intercept electromagnetic noise from the outside. The noise interception portions(32,34) receive signals through a power cable(18) connected with the screen portion. The noise interception portions(32,34) includes one ore more magnets. The magnets are installed at a connection part between the noise interception portions(32,34) and the power cable(18).
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