| 摘要 |
PROBLEM TO BE SOLVED: To provide an in-vacuum conveyance mechanism capable of using a large platelike object to be conveyed in a vacuum device without increasing a size of the vacuum device and provide the vacuum device provided with the same. SOLUTION: This in-vacuum conveyance mechanism 10 is provided with a main body having a hand part 11 gripping a substrate, a first moving mechanism for moving the hand part 11 in the direction of conveyance, and a guide mechanism 9 for moving the hand part 11 in a second direction crossing the direction of conveyance orthogonally. Consequently, the in-vacuum conveyance mechanism 10 can absorb a mechanical error of the vacuum device from a viewpoint of mechanism. |
