发明名称 SUBSTRATE DISK
摘要 The invention relates to a substrate disk consisting of two interconnected substrates (1, 2), with a centre hole (3). The inventive substrate disk is o f an especially good quality and can be produced with simple means. According to the invention, one of the substrates (1, 2) from which the disk is formed ha s at least one projection (5) on the edge of the centre hole, said projection projecting away from the substrate surface (6).
申请公布号 CA2320243(C) 申请公布日期 2003.03.25
申请号 CA19992320243 申请日期 1999.01.28
申请人 STEAG HAMATECH AG 发明人 BOCCIO, LOUIS J.
分类号 B29C65/78;B29C65/48;G11B7/24;G11B7/26;(IPC1-7):G11B7/26 主分类号 B29C65/78
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