| 摘要 |
The vacuum pump comprises a screw rotor pump with a compressor part (8) and an expander part (7), the compressor outlet (10) being connected to an ejector (1) and the expander part being connected via a valve (5) to a drive gas source (P), so that the expander can be operated in parallel with the ejector. An Independent claim is also included for a method for generating an under pressure using this pump. |
