| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical reaction apparatus in which functional elements such as reaction channels and the like are integrated in an ultra small space and which is capable of carrying out a catalytic reaction with a high reaction efficiency by suppressing the slow down of the reaction speed of the catalytic reaction and the deterioration of characteristics of the catalyst and provide a control method for the apparatus. SOLUTION: A reaction channel part to be employed for the chemical reaction apparatus is formed in a prescribed groove shape in one face side of an ultra small substrate 10 and is composed of a reaction flow channel 20A where a catalyst 21 is stuck to the inner wall face, a closing substrate 30 joined to the one face side of the ultra small substrate 10, a plurality of thin film heaters 41a, 41b, and 41c formed in the prescribed and same shape by patterning on the other face side of the ultra small substrate 10, and a plurality of heat generation control parts 61a, 61b, and 61c for separately controlling the heat generation state in the respective thin film heaters by supplying electric power in different levels to the respective thin film heaters 41a, 41b, and 41c. |
