发明名称 Method for the positionally accurate adjustment and fixing of a microoptical element
摘要 The inventor relates to method for the posibility accurate adjustment and fixing of a microoptical element on a carrier. In this case, an optical position monitor with a camera monitors the accurate adjustment of the microchip and an imaging optical system directed onto the microoptical and element. According to the invention, thermal radiation is fed into the position monitor and directed by the same imaging optical system onto the microchip, and in this way the thermal energy is guided to exactly the correct point.
申请公布号 US6538229(B1) 申请公布日期 2003.03.25
申请号 US20000562260 申请日期 2000.05.02
申请人 INFINEON TECHNOLOGIES AG 发明人 BOGNER GEORG;ALTHAUS HANS-LUDWIG
分类号 B23K1/005;B23K26/04;H05K13/04;(IPC1-7):H01L21/60;B23K26/02 主分类号 B23K1/005
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