| 发明名称 |
Electrostatic chuck having heater and method |
| 摘要 |
An electrostatic chuck 55 for holding a substrate 30 comprises an electrostatic member 100 made from a dielectric 115 covering an electrode 105 that is chargeable to electrostatically hold the substrate 30. A base 175 that includes a heater 235 is joined to the electrostatic member 100. The base may be made from a composite material, such as a porous ceramic infiltrated with the metal, and may be joined to the electrostatic member by a bond layer.
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| 申请公布号 |
US6538872(B1) |
申请公布日期 |
2003.03.25 |
| 申请号 |
US20010307214 |
申请日期 |
2001.11.05 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
WANG YOU;SHAMOUILIAN SHAMOUIL;KHOLODENKO ARNOLD;VEYTSER ALEXANDER M.;BEDI SURINDER S.;NARENDRNATH KADTHALA R.;KATS SEMYON L.;GRIMARD DENNIS S.;CHENG WING L.;KUMAR ANANDA H. |
| 分类号 |
H01L21/00;H01L21/683;(IPC1-7):H01G23/00 |
主分类号 |
H01L21/00 |
| 代理机构 |
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