METHOD AND DEVICE FOR LASER BEAM MACHINING AND DEVICE FOR MOVING MIRROR

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for laser beam machining and a device for moving mirrors with which the machining efficiency is improved without varying the power of a laser oscillator and the scannable region of a galvanoscanner. SOLUTION: A finely movable mirrors 21 and 22 with which small distances in the X-direction and the Y-direction are scanned, respectively, and have a high response frequency are arranged on the optical path of a laser beam 10 in addition to mirrors 31a and 32a which are driven by a pair of conventionally used galvanoscanners 31 and 32 for scanning in the X-direction and the Y- direction. Further, a control is performed to coordinately operate the galvanoscanners 31 and 32 and a driving means of the finely movable mirrors 21 and 22.