| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing device provided with a horizontally moving part capable of moving freely in a horizontal direction and a vertical moving part capable of moving freely in a vertical direction, wherein exciting force resulting from movements of the horizontally moving part and the vertically moving part is prevented from transmitting to a floor and the exciting force to the floor is prevented from being generated. SOLUTION: Active mass dampers 20a, 20b are arranged on a bed 4. For example, when moving an X table 5a, weights 27a, 27b provided at the active mass dampers 20a, 20b are moved by using an input signal that is inputted in a motor 6a for driving the X table 5a to balance out inertial force caused by the X table 5a moving with inertial force caused by the weights 27a, 27b moving.
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