| 摘要 |
There are disclosed a vibration isolating apparatus and a vibration eliminating method imposed less restrictions on the positioning of components, such as active actuators, forming part of the vibration isolating apparatus. The vibration isolating apparatus can be implemented with a relatively simple controller (such as an analog circuit) and can limit the interference of control forces to a practically ignorable degree. The vibration isolating apparatus has a table for mounting thereon a device vulnerable to vibrations, a plurality of sensors 15-20 for detecting motions of the table and a plurality of active actuators 11-14 for controlling positions of the table. Processing and controlling means converts values measured by the respective sensors and control forces exerted by the respective active actuators to control and operating amounts for motions in a total of six degrees of freedom: one each for translation in the vertical direction and for rotation about the axis of the translation of the device vulnerable to vibrations, resiliently supported by the vibration isolating apparatus, or the table, and two each for translations on a horizontal plane and rotations about the axes of the translations. The conversion is performed on the assumption that the resilient supporting center matches the center of gravity, and based on the two-dimensional positional relationship between the resilient supporting center and the sensors and the active actuators.
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