发明名称 Semiconductor integrated circuit device and method of manufacturing the same
摘要 A capacitive element C1 having a small leakage current is formed by utilizing a gate oxide film 9B thicker than that of a MISFET of a logic section incorporated in a CMOS gate array, without increasing the number of steps of manufacturing the CMOS gate array. The capacitive element C1 has a gate electrode 10E. A part of the gate electrode 10E is made of a polycrystalline silicon film. The polycrystalline silicon film is doped with n-type impurities, so that the capacitive element may reliably operate even at a low power-supply voltage.
申请公布号 US6538293(B2) 申请公布日期 2003.03.25
申请号 US20020142062 申请日期 2002.05.10
申请人 HITACHI, LTD. 发明人 SUZUKI KAZUHISA;TAKAHASHI TOSHIRO;YANAGISAWA YASUNOBU;NONAKA YUSUKE
分类号 H01L27/04;H01L21/822;H01L21/8234;H01L21/8238;H01L21/8242;H01L21/8244;H01L27/06;H01L27/092;H01L27/108;H01L27/11;(IPC1-7):H01L31/119 主分类号 H01L27/04
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