发明名称 Semiconductor device and a method of fabricating the same
摘要 The invention relates to a power MOSFET and reduction of the number of mask steps in a process of fabricating the power MOSFET. The increase of a parasitic capacitance due to the reduction is suppressed. In place of a thick insulating film 3, a gate insulating film 12 is formed on the entire surface of a semiconductor substrate. The gate-drain parasitic capacitance which uses the gate insulating film as a dielectric is suppressed by forming a removal region EL.
申请公布号 US6537899(B2) 申请公布日期 2003.03.25
申请号 US19980153346 申请日期 1998.09.15
申请人 SANYO ELECTRIC CO., LTD. 发明人 KUBO HIROTOSHI;KUWAKO EIICHIROH
分类号 H01L21/22;H01L21/336;H01L29/423;H01L29/78;H01L31/062;H01L31/113;H01L31/119;(IPC1-7):H01L21/22 主分类号 H01L21/22
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