,申请号JP19930149134-传众专利搜索

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发明名称
摘要
申请公布号	JP3388811(B2)	申请公布日期	2003.03.24
申请号	JP19930149134	申请日期	1993.06.21
申请人		发明人
分类号	B01J19/08;C23C16/50;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):B01J19/08;H01L21/306	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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