发明名称 Flat actuator or sensor having an internal pretensioning
摘要 The invention relates to a flat multilayer component (1) for use as an actuator or sensor, which is placed under internal pretension and, with regard to its shape, exhibits only a slight thermal drift. This component comprises an electrically activatable material layer (2), preferably a piezoceramic, as well as a passive middle layer (3) and another passive material layer (4). The middle layer (3) has a greater linear thermal coefficient of expansion than the materials of both adjacent layers (2, 4).
申请公布号 AU2002339541(A1) 申请公布日期 2003.03.24
申请号 AU20020339541 申请日期 2002.09.07
申请人 DREI-S-WERK PRAZISIONSWERKZEUGE GMBH AND CO. FERTIGUNGS-KG 发明人 BERNHARD DOLLGAST
分类号 H01L41/09;(IPC1-7):H01L41/09;H01L41/24 主分类号 H01L41/09
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