发明名称 FERROELECTRIC MEMORY DEVICE AND ITS MANUFACTURING METHOD
摘要 <p>A ferroelectric memory device comprises a first electrode (102), second electrodes (103) arrayed in a direction perpendicular to the first electrode (102), and a ferroelectric film (101) disposed at least in an intersection area of the first electrode (102) and the second electrodes (103). Capacitors constituted of the first electrode (102), the ferroelectric film (101), and the second electrodes (103) are arranged in a matrix. In the ferroelectric film (101), a ferroelectric phase and a paraelectric phase are mixedly present.</p>
申请公布号 WO2003023858(P1) 申请公布日期 2003.03.20
申请号 JP2002009032 申请日期 2002.09.05
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址