| 摘要 |
<p>PROBLEM TO BE SOLVED: To effectively prevent the generation of short-circuit between pattern parts constituting a wiring electrode element formed on a substrate. SOLUTION: This method comprises a step for forming a scanning line (3a) on a substrate (10), a process for forming a thin film (401) on this, a process for carrying out processing such as impurity drive-in to the lower layer side of the scanning line or the scanning line on the substrate, a process for removing the thin film after carrying out the drive-in processing, and a process for forming an inter-layer insulating film (41) on the scanning line after the removal processing.</p> |
