| 摘要 |
PROBLEM TO BE SOLVED: To provide a microwave circuit in which the generation of cracks or the like of a surface protecting film is prevented. SOLUTION: The microwave circuit is provided with a semiconductor substrate 11 in which a penetrating hole 12 penetrating vertically is formed, a rear conducting layer 13 formed on an internal surface of the penetrating hole 12, an electrode pattern 14 connected electrically with the rear conducting layer 13, and the surface protective film 18 formed on the semiconductor substrate 11. A gap 19 is formed between the electrode pattern 14 and the surface protective film 18.
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