| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas supply integration unit in which welding places having possibility of gas contamination are abolished. SOLUTION: In a cassette box 19, a primary side stop valve 13 and a purging valve 14 are detachably arranged to/from a primary valve function block 21 with bolts B4 and B5, a secondary side stop valve 18 is detachably arranged to/from a secondary valve function block 22 with a bolt B7, and the primary valve function block 21 and the secondary valve function block 22 are detachably connected to/from a fluid control function block 22 with bolts B8 and B9, to form a gas flow (the primary side stop valve 13 or the purging valve 14, a pressure regulation valve 15, a pressure transducer 16, an orifice 17 and the secondary stop valve 18).
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