METHOD FOR POLARIZATION BIREFRINGENCE COMPENSATION IN A WAVEGUIDE DEMULTIPLEXER USING A COMPENSATOR WITH A HIGH REFRACTIVE INDEX CAPPING LAYER

摘要

A method is disclosed for polarization birefringence compensation in a photonic device with a slab waveguide having a core. A compensator region is formed in the slab waveguide to minimize the wavelength shift between light of different polarizations. A thin capping layer, typically of silicon nitride, having a higher refractive index than the core, is formed on the compensator region to increase the birefringence contrast between the compensator region and the planar waveguide.