| 摘要 |
PROBLEM TO BE SOLVED: To solve such problems that a laser beam characteristic is degraded due to contamination of optical parts and maintenance operation is made more frequently because the optical parts constituting an optical resonator are constituted in a supersonic gas flow in the conventional supersonic gas flow type gas laser device, and oscillation efficiency is reduced and the cost of the optical parts increases due to an increase in optical loss because multiple folded optical system is incorporated for utilization of internal gain. SOLUTION: The light-pick up direction is coaxially set to be the direction of a gas flow, and the optical parts are arranged in an area where the velocity of gas is low in a supersonic gas laser device. Thus, the contamination of the optical parts due to the supersonic gas flow can be reduced, and highly efficient oscillation and a low cost are also obtained through the reduced number of optical parts. |
