METHOD OF SCHEDULING SUBSTRATE TREATMENT APPARATUS AND PROGRAM THEREOF

摘要

PROBLEM TO BE SOLVED: To restrain useless liquid changes for fully treating a plurality of lots by grouping these lots in the same setting to schedule the liquid change. SOLUTION: Based on the recipe of a plurality of thrown-in lots, those having the same settings about a chemical treatment unit 51 are grouped and only those having settings equal to the present setting conditions of the treatment unit 51 are set as targets of schedule. Thus they are previously scheduled for estimating treatments needing changes of treatment liquids, thereby limiting the liquid change to a minimum in the chemical treatment unit. Hence useless liquid changes are suppressed, to make the treatment effective.