发明名称 METHOD OF TREATING PHOTORESISTS USING ELECTRODELESS UV LAMPS
摘要 <p>Methods for treating a photoresist by exposure to light from an electrodeless UV bulb are disclosed. The methods are applicable to both positive and negative photoresists. In the case of positive photoresists, use of electrodeless UV lamps significantly reduces the UV exposure time. Methods for making circuit boards and apparatus for making circuit boards are also disclosed.</p>
申请公布号 WO2003024171(A2) 申请公布日期 2003.03.20
申请号 US2002028647 申请日期 2002.09.10
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址