PHOTODIODE ARRAY, SOLID IMAGE PICKUP UNIT AND RADIATION DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a photodiode array capable of satisfactorily reducing the generation of any cross-talk even at the time of collecting electrodes or wiring at one face side. SOLUTION: In a photodiode array 1, a plurality of p type semiconductor layers 3 are arranged on a surface 2s of an n- type semiconductor substrate 2, and light to be detected is made incident from a back face 2u side of the semiconductor substrate 2. A plurality of n+ type channel stopper layers 2 are arranged at the surface 2s side of the semiconductor substrate 2 so as to be positioned in the neighborhood of each p type semiconductor layer 3. Also, a trench part 10 extended from the corresponding channel stopper layer 4 to the back face 2u is arranged at the surface 2s side of the semiconductor substrate 2 so that each p type semiconductor layer 3 and the periphery of the channel stopper layer 4 in the neighborhood can be completely surrounded.