| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum processing unit responding to an increasing diameter of a sample while suppressing an increase in production cost without sacrificing maintainability. SOLUTION: The vacuum processing unit comprises a cassette table for mounting a cassette containing a sample, a first sample carrying means for carrying the sample one by one, a load lock chamber, a chamber for processing the sample under vacuum, and a second sample carrying means for carrying the sample under vacuum. The cassette table is disposed in the atmosphere at the front section of the vacuum processing unit, the first sample carrying means is arranged to carry the sample one by one between a plurality of cassettes disposed side by side at the front section and the load lock chamber, and the vacuum processing unit has a function for evaluating or inspecting the sample processed in the vacuum processing chamber. |
