INKJET DEPOSITION APPARATUS AND METHOD

摘要

In an inkjet deposition apparatus, a print head is translated in a transverse direction relative to a substrate and the deviation of the print head relative to a first alignment mark is measured. The inkjet head is then translated in a longitudinal direction relative to the substrate and the deviation of the print head to a further alignment mark is measured. A correction factor for a control unit for translation stage of the apparatus is then generated from the measured deviations.