| 摘要 |
A vacuum coating apparatus is provided, which ensures a high stability and reliability in the operation using the plasma, and which is further capable of operating at a much higher surface temperature of a heater. At least one substrate 8 disposed in a vacuum chamber 1 is heated, and then at least one layer is coated on the surface of the at substrate 8 thus heated, while applying plasma thereto. A long cylindrical hollow element 12 having a bottom wall is disposed in the vacuum chamber 1, and the inside of the hollow element 12 is isolated from the environment in the vacuum chamber 1. The substrate 8 is disposed outside of the hollow element 12 and heated by the radiation emanating from the outer surface of the hollow element 12 which is heated from the inside thereof by means of heating means 14.
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