| 摘要 |
PROBLEM TO BE SOLVED: To improve the exfoliation of an electrode containing Pd or Pt and the exfoliation of a dielectric film. SOLUTION: The exfoliation of the electrode can be prevented by being equipped with a GaNX contact layer containing one or more elements X selected from among As, P, or Sb in contact with an area to the electrode containing at least on of a nitride semiconductor layer, Pd, and Pt. Additionally, the exfoliation of the dielectric film can prevented by forming a dielectric film in contact with the GaNX contact layer. |
