| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact, highly efficient, and inexpensive low-voltage axial direction exciting method F2 laser device. SOLUTION: This axial direction exciting method F2 laser device (11) is provided with a discharging tube (1) comprised of an insulator cylinder and metallic electrodes (2) and (3) on its both ends, and a reflection mirror (5) or a transmissive mirror (6) comprising a resonator outside the electrodes (2) and (3). The discharging electrodes (2) and (3) are given a high voltage for pulse discharge by a driving circuit. Total gas pressure in the discharging tube (1) is >=10 Torr and <=100 Torr, and the concentration of F2 gas to the whole gas is >=0.2% and <=2.0%. |
