| 发明名称 |
SILICONE RESINS AND POROUS MATERIALS PRODUCED THEREFROM |
| 摘要 |
Silicone resins having the general formula (R<1>SiO3/2)y where R<1> is an alkyl group having 8 to 24 carbon atoms; x has a value of 0.05 to 0.7; y has a value of 0.3 to 0.95 and x+y = 1. The resins are used to form porous ceramic materials and porous thin films on semiconductor devices.
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| 申请公布号 |
WO03023831(A1) |
申请公布日期 |
2003.03.20 |
| 申请号 |
WO2002US27755 |
申请日期 |
2002.08.29 |
| 申请人 |
DOW CORNING CORPORATION;ZHONG, BIANXIAO |
发明人 |
ZHONG, BIANXIAO |
| 分类号 |
C04B38/06;C08G77/12;C08G77/14;C09D183/04;H01L21/312;H01L21/316;H01L21/768;H01L23/522;(IPC1-7):H01L21/00;C09D183/00 |
主分类号 |
C04B38/06 |
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