| 摘要 |
PROBLEM TO BE SOLVED: To provide an orientational ferroelectric thin film element, which is provided with a highly oriented ferroelectric thin film on a substrate, has proper characteristic and can be manufactured at a low cost, and to provide a method for efficiently manufacturing the same. SOLUTION: In the ferroelectric thin film element provided with the ferroelectric thin film 3 composed of a Pb system perovskite oxide formed on a conducive thin film 2 formed on the substrate 1, the conductive thin film 2 is a polycrystalline conductive thin film, the ferroelectric thin film 3 is provided with a first ferroelectric thin film 4 composed of the Pb system perovskite oxide and changes its composition from an interface with the polycrystalline conductive thin film 2 in the direction of a film thickness and a second ferroelectric thin film 5 which is formed on the first ferroelectric thin film 4 and has a composition constant in the direction of the film thickness, and the first and second ferroelectric films 4 and 5 have constitutions in each of which a c-axis grows in uniaxial orientation vertical with respect to the substrate. |
