| 发明名称 |
Method of determination of true nonlinearity of scan along a selected direction X or Y in scan microscope |
| 摘要 |
A scan nonlinearity in scan microscopes is determined so as to take into consideration of a contribution of a nonlinearity of scans and a uniformity of a test object in a total, imaginary nonlinearity of image.
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| 申请公布号 |
US2003055588(A1) |
申请公布日期 |
2003.03.20 |
| 申请号 |
US20010945527 |
申请日期 |
2001.09.04 |
| 申请人 |
NIKITIN ARKADY |
发明人 |
NIKITIN ARKADY |
| 分类号 |
G01Q40/02;G01Q60/00;G02B21/00;H01J37/28;(IPC1-7):G01C17/38;G06F19/00;G01P21/00 |
主分类号 |
G01Q40/02 |
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代理人 |
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| 主权项 |
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| 地址 |
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