Fabrication method of blue light emitting ZnO thin film phosphor

摘要

The present invention relates to a fabrication method of blue light emitting ZnO thin film phosphor. More particularly, the invention relates to a fabrication method of blue light emitting ZnO thin film phosphor simply by heat treatment without making Al-added alloy. The present invention is characterized by loading substrate that is vapor-deposited with dopant-added ZnO thin film into a heat-treating chamber, and heat-treating it quickly under gas atmosphere to activate the dopant. According to the present invention, a thin film phosphor having new luminescence peak can be fabricated by quick-heat-treatment of zinc compound semiconductor under hydrogen atmosphere. This thin film phosphor can replace the conventional blue luminescence using alloy-type ZnO and furthermore can be utilized as blue light emitting material for flat plate display elements such as FED and PDP.