| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device, capable of preventing manufacturing yield from being reduced by decreasing the dispersion of an equivalent circuit constant, such as serial inductance which is generated in response to the deviation of substrate parallelism, in the device to be manufactured. SOLUTION: The piezoelectric device comprises an overall surface electrode formed over substantially the entire surface of a recess side of a piezoelectric substrate having a thin oscillation section, a thick annular surrounding section integrally constituted with the oscillation section to hold a periphery of the oscillation section by forming the recess at a predetermined position of one main surface, and a main electrode of a predetermined size formed in a region, corresponding to the oscillation section on other main surface of the substrate. The device further comprises at least one substrate thickness measuring electrode disposed at a predetermined distance from the main electrode, to evaluate a thickness of the substrate in the region corresponding to the oscillation section of the other main surface. |
